diff --git a/drivers/at86rf2xx/Kconfig b/drivers/at86rf2xx/Kconfig
index f93c04e1ab..a0b3772cf9 100644
--- a/drivers/at86rf2xx/Kconfig
+++ b/drivers/at86rf2xx/Kconfig
@@ -14,7 +14,8 @@ menuconfig MODULE_AT86RF2XX
     select MODULE_NETDEV
     select MODULE_NETDEV_IEEE802154
     select MODULE_NETDEV_LEGACY_API
-    select MODULE_XTIMER
+    select MODULE_ZTIMER
+    select MODULE_ZTIMER_USEC
 
 if MODULE_AT86RF2XX
 
diff --git a/drivers/at86rf2xx/Makefile.dep b/drivers/at86rf2xx/Makefile.dep
index 6f377f217f..0c81eb5cdb 100644
--- a/drivers/at86rf2xx/Makefile.dep
+++ b/drivers/at86rf2xx/Makefile.dep
@@ -1,7 +1,8 @@
 DEFAULT_MODULE += auto_init_at86rf2xx
 DEFAULT_MODULE += netdev_ieee802154_oqpsk
 
-USEMODULE += xtimer
+USEMODULE += ztimer
+USEMODULE += ztimer_usec
 USEMODULE += ieee802154
 USEMODULE += netdev_ieee802154
 USEMODULE += netdev_legacy_api
diff --git a/drivers/at86rf2xx/aes_spi.c b/drivers/at86rf2xx/aes_spi.c
index d7554120e3..fe34b48ee1 100644
--- a/drivers/at86rf2xx/aes_spi.c
+++ b/drivers/at86rf2xx/aes_spi.c
@@ -18,7 +18,7 @@
 
 #include <assert.h>
 
-#include "xtimer.h"
+#include "ztimer.h"
 #include "periph/spi.h"
 #include "at86rf2xx_aes.h"
 
@@ -55,7 +55,7 @@ uint8_t _aes_status(at86rf2xx_t *dev)
 static inline
 void _aes_wait_for_result(at86rf2xx_t *dev)
 {
-    xtimer_usleep(AT86RF2XX_AES_DELAY_US);
+    ztimer_sleep(ZTIMER_USEC, AT86RF2XX_AES_DELAY_US);
     uint8_t status = _aes_status(dev);
     /*
         If this assert fires, there probably is an implementation error.
diff --git a/drivers/at86rf2xx/at86rf2xx_internal.c b/drivers/at86rf2xx/at86rf2xx_internal.c
index 22a118e7a2..dcb33256ab 100644
--- a/drivers/at86rf2xx/at86rf2xx_internal.c
+++ b/drivers/at86rf2xx/at86rf2xx_internal.c
@@ -21,7 +21,7 @@
  * @}
  */
 
-#include "xtimer.h"
+#include "ztimer.h"
 #include "at86rf2xx_internal.h"
 #include "at86rf2xx_registers.h"
 
@@ -127,9 +127,9 @@ void at86rf2xx_assert_awake(at86rf2xx_t *dev)
 #else
         gpio_clear(dev->params.sleep_pin);
 #endif
-        xtimer_usleep(AT86RF2XX_WAKEUP_DELAY);
+        ztimer_sleep(ZTIMER_USEC, AT86RF2XX_WAKEUP_DELAY);
 
-        /* update state: on some platforms, the timer behind xtimer
+        /* update state: on some platforms, the timer behind ztimer
          * may be inaccurate or the radio itself may take longer
          * to wake up due to extra capacitance on the oscillator.
          * Spin until we are actually awake
@@ -149,10 +149,10 @@ void at86rf2xx_hardware_reset(at86rf2xx_t *dev)
     *(AT86RF2XX_REG__TRXPR) |= AT86RF2XX_TRXPR_TRXRST;
 #else
     gpio_clear(dev->params.reset_pin);
-    xtimer_usleep(AT86RF2XX_RESET_PULSE_WIDTH);
+    ztimer_sleep(ZTIMER_USEC, AT86RF2XX_RESET_PULSE_WIDTH);
     gpio_set(dev->params.reset_pin);
 #endif
-    xtimer_usleep(AT86RF2XX_RESET_DELAY);
+    ztimer_sleep(ZTIMER_USEC, AT86RF2XX_RESET_DELAY);
 
     /* update state: if the radio state was P_ON (initialization phase),
      * it remains P_ON. Otherwise, it should go to TRX_OFF
diff --git a/drivers/at86rf2xx/include/at86rf2xx_internal.h b/drivers/at86rf2xx/include/at86rf2xx_internal.h
index 2cad8c34eb..44f846a871 100644
--- a/drivers/at86rf2xx/include/at86rf2xx_internal.h
+++ b/drivers/at86rf2xx/include/at86rf2xx_internal.h
@@ -65,7 +65,7 @@ extern "C" {
 
 /**
  * @brief   Minimum reset pulse width, refer p.190. We use 62us so
- *          that it is at least one tick on platforms with coarse xtimers
+ *          that it is at least one tick on platforms with coarse ztimers
  */
 #define AT86RF2XX_RESET_PULSE_WIDTH     (62U)