diff --git a/cpu/samd5x/Kconfig b/cpu/samd5x/Kconfig
index 27210f8ffb..786ad65c99 100644
--- a/cpu/samd5x/Kconfig
+++ b/cpu/samd5x/Kconfig
@@ -5,7 +5,7 @@
 # directory for more details.
 #
 
-config CPU_FAM_SAMD5X
+config CPU_COMMON_SAMD5X
     bool
     select CPU_COMMON_SAM0
     select CPU_CORE_CORTEX_M4F
@@ -14,25 +14,29 @@ config CPU_FAM_SAMD5X
     select HAS_CPU_SAMD5X
     select HAS_PERIPH_HWRNG
 
-## CPU Models
-config CPU_MODEL_SAME54P20A
+config CPU_FAM_SAMD51
     bool
-    select CPU_FAM_SAMD5X
+    select CPU_COMMON_SAMD5X
+
+config CPU_FAM_SAME54
+    bool
+    select CPU_COMMON_SAMD5X
 
 ## Declaration of specific features
 config HAS_CPU_SAMD5X
     bool
     help
-        Indicates that a 'samd5x' cpu is being used.
+        Indicates that a SAMD5x/SAME5x cpu is being used.
 
 ## CPU common symbols
 config CPU_FAM
-    default "samd5x" if CPU_FAM_SAMD5X
-
-config CPU_MODEL
-    default "same54p20a" if CPU_MODEL_SAME54P20A
+    default "samd51" if CPU_FAM_SAMD51
+    default "same54" if CPU_FAM_SAME54
 
 config CPU
-    default "samd5x" if CPU_FAM_SAMD5X
+    default "samd5x" if CPU_COMMON_SAMD5X
+
+source "$(RIOTCPU)/samd5x/Kconfig.samd51"
+source "$(RIOTCPU)/samd5x/Kconfig.same54"
 
 source "$(RIOTCPU)/sam0_common/Kconfig"
diff --git a/cpu/samd5x/Kconfig.samd51 b/cpu/samd5x/Kconfig.samd51
new file mode 100644
index 0000000000..7b32b420ec
--- /dev/null
+++ b/cpu/samd5x/Kconfig.samd51
@@ -0,0 +1,47 @@
+## CPU Models
+config CPU_MODEL_SAMD51G18A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51G19A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51J18A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51J19A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51J20A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51N19A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51N20A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51P19A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL_SAMD51P20A
+    bool
+    select CPU_FAM_SAMD51
+
+config CPU_MODEL
+    default "samd51g18a" if CPU_MODEL_SAMD51G18A
+    default "samd51g19a" if CPU_MODEL_SAMD51G19A
+    default "samd51j18a" if CPU_MODEL_SAMD51J18A
+    default "samd51j19a" if CPU_MODEL_SAMD51J19A
+    default "samd51j20a" if CPU_MODEL_SAMD51J20A
+    default "samd51n19a" if CPU_MODEL_SAMD51N19A
+    default "samd51n20a" if CPU_MODEL_SAMD51N20A
+    default "samd51p19a" if CPU_MODEL_SAMD51P19A
+    default "samd51p20a" if CPU_MODEL_SAMD51P20A
diff --git a/cpu/samd5x/Kconfig.same54 b/cpu/samd5x/Kconfig.same54
new file mode 100644
index 0000000000..0f0afb6ce6
--- /dev/null
+++ b/cpu/samd5x/Kconfig.same54
@@ -0,0 +1,22 @@
+## CPU Models
+config CPU_MODEL_SAME54N19A
+    bool
+    select CPU_FAM_SAME54
+
+config CPU_MODEL_SAME54N20A
+    bool
+    select CPU_FAM_SAME54
+
+config CPU_MODEL_SAME54P19A
+    bool
+    select CPU_FAM_SAME54
+
+config CPU_MODEL_SAME54P20A
+    bool
+    select CPU_FAM_SAME54
+
+config CPU_MODEL
+    default "same54n19a" if CPU_MODEL_SAME54N19A
+    default "same54n20a" if CPU_MODEL_SAME54N20A
+    default "same54p19a" if CPU_MODEL_SAME54P19A
+    default "same54p20a" if CPU_MODEL_SAME54P20A